@misc{indiciaee6d9c5470550,
  title = {Oxygen-based digital etching of AlGaN/GaN structures with AlN as etch-stop layers},
  author = {Jingyi Wu and Siqi Lei and Wei-Chih Cheng and Robert Sokolovskij and Qing Wang and Guangrui and Xia and Hongyu Yu},
  year = {2019},
  url = {https://arxiv.org/abs/1908.00124},
  note = {Source identifier: 1908.00124}
}