TY  - RPRT
TI  - Oxygen-based digital etching of AlGaN/GaN structures with AlN as etch-stop layers
AU  - Jingyi Wu
AU  - Siqi Lei
AU  - Wei-Chih Cheng
AU  - Robert Sokolovskij
AU  - Qing Wang
AU  - Guangrui
AU  - Xia
AU  - Hongyu Yu
PY  - 2019
UR  - https://arxiv.org/abs/1908.00124
ID  - 1908.00124
ER  -