TY  - RPRT
TI  - Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
AU  - J. W. Roberts
AU  - P. R. Chalker
AU  - B. Ding
AU  - R. A. Oliver
AU  - J. T. Gibbon
AU  - L. A. H. Jones
AU  - V. R. Dhanak
AU  - L. J. Phillips
AU  - J. D. Major
AU  - F. C-P. Massabuau
PY  - 2019
DO  - 10.1016/j.jcrysgro.2019.125254
UR  - https://arxiv.org/abs/1908.06914
ID  - 1908.06914
ER  -