TY  - RPRT
TI  - Optical deep learning nano-profilometry
AU  - Jinlong Zhu
AU  - Yanan Liu
AU  - Sanyogita Purandare
AU  - Jian-Ming Jin
AU  - Shiyuan Liu
AU  - Lynford L. Goddard
PY  - 2019
UR  - https://arxiv.org/abs/1908.07017
ID  - 1908.07017
ER  -