@misc{indiciae555ec9882f77,
  title = {Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators},
  author = {Calder Sheagren and Peter Barry and Erik Shirokoff and Qing Yang Tang},
  year = {2019},
  doi = {10.1007/s10909-020-02336-2},
  url = {https://arxiv.org/abs/1908.07146},
  note = {Source identifier: 1908.07146}
}