TY  - RPRT
TI  - Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
AU  - Calder Sheagren
AU  - Peter Barry
AU  - Erik Shirokoff
AU  - Qing Yang Tang
PY  - 2019
DO  - 10.1007/s10909-020-02336-2
UR  - https://arxiv.org/abs/1908.07146
ID  - 1908.07146
ER  -