@misc{indiciaee78b4febf19d, title = {Integration of Atomic Layer Epitaxy Crystalline Ga2O3 on Diamond for Thermal Management}, author = {Zhe Cheng and Virginia D. Wheeler and Tingyu Bai and Jingjing Shi and Marko J. Tadjer and Tatyana Feygelson and Karl D. Hobart and Mark S. Goorsky and Samuel Graham}, year = {2019}, doi = {10.1063/1.5125637}, url = {https://arxiv.org/abs/1908.08665}, note = {Source identifier: 1908.08665} }