@misc{indiciae3da4f1f8dcd7,
  title = {Mask-less Patterning of Gallium-irradiated Superconducting Silicon Using Focused Ion Beam},
  author = {Ryo Matsumoto and Shintaro Adachi and El Hadi S. Sadki and Sayaka Yamamoto and Hiromi Tanaka and Hiroyuki Takeya and Yoshihiko Takano},
  year = {2019},
  doi = {10.1021/acsaelm.9b00781},
  url = {https://arxiv.org/abs/1908.09272},
  note = {Source identifier: 1908.09272}
}