TY  - RPRT
TI  - Mask-less Patterning of Gallium-irradiated Superconducting Silicon Using Focused Ion Beam
AU  - Ryo Matsumoto
AU  - Shintaro Adachi
AU  - El Hadi S. Sadki
AU  - Sayaka Yamamoto
AU  - Hiromi Tanaka
AU  - Hiroyuki Takeya
AU  - Yoshihiko Takano
PY  - 2019
DO  - 10.1021/acsaelm.9b00781
UR  - https://arxiv.org/abs/1908.09272
ID  - 1908.09272
ER  -