@misc{indiciae6a165f854e76,
  title = {Direct Patterning of Boron-doped Amorphous Carbon Using Focused Ion Beam-assisted Chemical Vapor Deposition},
  author = {Ryo Matsumoto and El Hadi S. Sadki and Hiromi Tanaka and Sayaka Yamamoto and Shintaro Adachi and Hiroyuki Takeya and Yoshihiko Takano},
  year = {2019},
  doi = {10.1016/j.tsf.2021.138704},
  url = {https://arxiv.org/abs/1908.09273},
  note = {Source identifier: 1908.09273}
}