@misc{indiciae49de4710c1a0, title = {Mathematical Modelling and Comparative Study of Elliptical and Circular Capacitive Pressure Microsensor}, author = {Rishabh Bhooshan Mishra and S. Santosh Kumar}, year = {2019}, doi = {10.1088/1742-6596/1240/1/012068}, url = {https://arxiv.org/abs/1908.10444}, note = {Source identifier: 1908.10444} }