@misc{indiciae8b76f4c34e70,
  title = {Microstructures Diagram Of Magnetron Sputtered Aln Deposits : Amorphous And Nanostructured Films},
  author = {Valerie Brien and P. Pigeat},
  year = {2019},
  doi = {10.1016/j.jcrysgro.2006.10.238},
  url = {https://arxiv.org/abs/1909.01579},
  note = {Source identifier: 1909.01579}
}