TY  - RPRT
TI  - Microstructures Diagram Of Magnetron Sputtered Aln Deposits : Amorphous And Nanostructured Films
AU  - Valerie Brien
AU  - P. Pigeat
PY  - 2019
DO  - 10.1016/j.jcrysgro.2006.10.238
UR  - https://arxiv.org/abs/1909.01579
ID  - 1909.01579
ER  -