@misc{indiciae1ca3552aae38, title = {Deposition of MAX phase containing thin films from a (Ti,Zr)2AlC compound target}, author = {Clio Azina and Bensu Tunca and Andrejs Petruhins and Binbin Xin and Melike Yildizhan and Per O. Å. Persson and Jozef Vleugels and Konstantina Lambrinou and Johanna Rosén and Per Eklund}, year = {2020}, doi = {10.1016/j.apsusc.2021.149370}, url = {https://arxiv.org/abs/1909.04097}, note = {Source identifier: 1909.04097} }