@misc{indiciae657b0229fd8f,
  title = {A parylene coating system specifically designed for producing ultra-thin films for nanoscale device applications},
  author = {J. G. Gluschke and F. Richter and A. P. Micolich},
  year = {2019},
  doi = {10.1063/1.5099293},
  url = {https://arxiv.org/abs/1909.05595},
  note = {Source identifier: 1909.05595}
}