TY  - RPRT
TI  - A parylene coating system specifically designed for producing ultra-thin films for nanoscale device applications
AU  - J. G. Gluschke
AU  - F. Richter
AU  - A. P. Micolich
PY  - 2019
DO  - 10.1063/1.5099293
UR  - https://arxiv.org/abs/1909.05595
ID  - 1909.05595
ER  -