@misc{indiciaeaff1f4400825,
  title = {Ar/Cl\$\_\{2\}\$ etching of GaAs optomechanical microdisks fabricated with positive electroresist},
  author = {Rodrigo Benevides and Michaël Ménard and Gustavo S. Wiederhecker and Thiago P. Mayer Alegre},
  year = {2019},
  doi = {10.1364/ome.10.000057},
  url = {https://arxiv.org/abs/1909.06881},
  note = {Source identifier: 1909.06881}
}