TY  - RPRT
TI  - Ar/Cl$_{2}$ etching of GaAs optomechanical microdisks fabricated with positive electroresist
AU  - Rodrigo Benevides
AU  - Michaël Ménard
AU  - Gustavo S. Wiederhecker
AU  - Thiago P. Mayer Alegre
PY  - 2019
DO  - 10.1364/ome.10.000057
UR  - https://arxiv.org/abs/1909.06881
ID  - 1909.06881
ER  -