@misc{indiciae22e08603ef95,
  title = {Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere},
  author = {Martin Magnuson and Lina Tengdelius and Fredrik Eriksson and Mattias Samuelsson and Esteban Broitman and Grzegorz Greczynski and Lars Hultman and Hans Högberg},
  year = {2019},
  doi = {10.1016/j.tsf.2019.06.034},
  url = {https://arxiv.org/abs/1909.07197},
  note = {Source identifier: 1909.07197}
}