@misc{indiciaee42c2505ee35,
  title = {Measurement Anomaly of Step Width in Calibration Grating using Atomic Force Microscopy},
  author = {Gun Ahn and Yoon-Young Choi and Dean J. Miller and Hanwook Song and Kwangsoo No and Seungbum Hong},
  year = {2019},
  url = {https://arxiv.org/abs/1909.09508},
  note = {Source identifier: 1909.09508}
}