@misc{indiciae733578fadec1,
  title = {Integrating high-quality dielectrics with one-nanometer equivalent oxide thickness on two-dimensional electronic devices},
  author = {Weisheng Li and Jian Zhou and Songhua Cai and Zhihao Yu and Jialin Zhang and Nan Fang and Taotao Li and Yun Wu and Tangsheng Chen and Xiaoyu Xie and Haibo Ma and Ke Yan and Ningxuan Dai and Xiangjin Wu and Huijuan Zhao and Zixuan Wang and Daowei He and Lijia Pan and Yi Shi and Peng Wang and Wei Chen and Kosuke Nagashio and Xiangfeng Duan and Xinran Wang},
  year = {2019},
  url = {https://arxiv.org/abs/1909.09753},
  note = {Source identifier: 1909.09753}
}