@misc{indiciae8d3d96372a24,
  title = {High-Q Si3N4 microresonators based on a subtractive processing for Kerr nonlinear optics},
  author = {Zhichao Ye and Krishna Twayana and Peter A. Andrekson and Victor Torres-Company},
  year = {2019},
  doi = {10.1364/oe.27.035719},
  url = {https://arxiv.org/abs/1909.10251},
  note = {Source identifier: 1909.10251}
}