TY  - RPRT
TI  - High-Q Si3N4 microresonators based on a subtractive processing for Kerr nonlinear optics
AU  - Zhichao Ye
AU  - Krishna Twayana
AU  - Peter A. Andrekson
AU  - Victor Torres-Company
PY  - 2019
DO  - 10.1364/oe.27.035719
UR  - https://arxiv.org/abs/1909.10251
ID  - 1909.10251
ER  -