@misc{indiciae8d8225a548b0,
  title = {High quality Al\$\_\{0.37\}\$In\$\_\{0.63\}\$N layers grown at low temperature (<300\$\textasciicircum{}\textbackslash{}circ\$C) by radio-frequency sputtering},
  author = {A Núñez-Cascajero and R. Blasco and S Valdueza-Felip and D. Montero and J. Olea and F. B. Naranjo},
  year = {2019},
  doi = {10.1016/j.mssp.2019.04.029},
  url = {https://arxiv.org/abs/1909.12068},
  note = {Source identifier: 1909.12068}
}