TY  - RPRT
TI  - High quality Al$_{0.37}$In$_{0.63}$N layers grown at low temperature (<300$^\circ$C) by radio-frequency sputtering
AU  - A Núñez-Cascajero
AU  - R. Blasco
AU  - S Valdueza-Felip
AU  - D. Montero
AU  - J. Olea
AU  - F. B. Naranjo
PY  - 2019
DO  - 10.1016/j.mssp.2019.04.029
UR  - https://arxiv.org/abs/1909.12068
ID  - 1909.12068
ER  -