@misc{indiciae2497c1a56c65,
  title = {Plasma Profiling Time-of-Flight Mass Spectrometry for Fast Elemental Analysis of Semiconductor Structures with Depth Resolution in the Nanometer Range},
  author = {Hendrik Spende and Christoph Margenfeld and Tobias Meyer and Irene Manglano Clavero and Heiko Bremers and Andreas Hangleiter and Michael Seibt and Andreas Waag and Andrey Bakin},
  year = {2019},
  doi = {10.1088/1361-6641/ab6ac0},
  url = {https://arxiv.org/abs/1909.12779},
  note = {Source identifier: 1909.12779}
}