TY  - RPRT
TI  - Plasma Profiling Time-of-Flight Mass Spectrometry for Fast Elemental Analysis of Semiconductor Structures with Depth Resolution in the Nanometer Range
AU  - Hendrik Spende
AU  - Christoph Margenfeld
AU  - Tobias Meyer
AU  - Irene Manglano Clavero
AU  - Heiko Bremers
AU  - Andreas Hangleiter
AU  - Michael Seibt
AU  - Andreas Waag
AU  - Andrey Bakin
PY  - 2019
DO  - 10.1088/1361-6641/ab6ac0
UR  - https://arxiv.org/abs/1909.12779
ID  - 1909.12779
ER  -