TY  - RPRT
TI  - Electromagnetic modeling of near-field phase-shifting contact lithography with broadband ultraviolet illumination
AU  - Fei Wang
AU  - Katherine E. Weaver
AU  - Akhlesh Lakhtakia
AU  - Mark W. Horn
PY  - 2019
DO  - 10.1016/j.ijleo.2004.10.001
UR  - https://arxiv.org/abs/1909.13618
ID  - 1909.13618
ER  -