@misc{indiciae09f90202b570,
  title = {CMOS Platform for Atomic-Scale Device Fabrication},
  author = {Tomas Skeren and Nikola Pascher and Arnaud Garnier and Patrick Reynaud and Emmanuel Rolland and Aurelie Thuaire and Daniel Widmer and Xavier Jehl and Andreas Fuhrer},
  year = {2019},
  doi = {10.1088/1361-6528/aad7ab},
  url = {https://arxiv.org/abs/1910.00718},
  note = {Source identifier: 1910.00718}
}