@misc{indiciae6c365b149ef7,
  title = {Site-controlled formation of single Si nanocrystals in a buried SiO2 matrix using ion beam mixing},
  author = {Xiaomo Xu and Thomas Prüfer and Daniel Wolf and Hans-Jürgen Engelmann and Lothar Bischoff and René Hübner and Karl-Heinz Heinig and Wolfhard Möller and Stefan Facsko and Johannes von Borany and Gregor Hlawacek},
  year = {2019},
  doi = {10.3762/bjnano.9.267},
  url = {https://arxiv.org/abs/1910.04389},
  note = {Source identifier: 1910.04389}
}