@misc{indiciaec7ae9b0ce59c,
  title = {Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN},
  author = {Risheng Cheng and Sihao Wang and Hong X. Tang},
  year = {2019},
  doi = {10.1063/1.5131664},
  url = {https://arxiv.org/abs/1910.07010},
  note = {Source identifier: 1910.07010}
}