TY  - RPRT
TI  - Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
AU  - Risheng Cheng
AU  - Sihao Wang
AU  - Hong X. Tang
PY  - 2019
DO  - 10.1063/1.5131664
UR  - https://arxiv.org/abs/1910.07010
ID  - 1910.07010
ER  -