@misc{indiciae9b4a21efe9eb, title = {Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses}, author = {Kevin Werner and Vitaly Gruzdev and Noah Talisa and Kyle Kafka and Drake Austin and Carl M. Liebig and Enam Chowdhury}, year = {2019}, doi = {10.1038/s41598-019-56384-0}, url = {https://arxiv.org/abs/1910.07953}, note = {Source identifier: 1910.07953} }