TY - RPRT TI - Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses AU - Kevin Werner AU - Vitaly Gruzdev AU - Noah Talisa AU - Kyle Kafka AU - Drake Austin AU - Carl M. Liebig AU - Enam Chowdhury PY - 2019 DO - 10.1038/s41598-019-56384-0 UR - https://arxiv.org/abs/1910.07953 ID - 1910.07953 ER -