@misc{indiciaeece6f7788a82,
  title = {Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS},
  author = {Mika Pflüger and R. Joseph Kline and Analía Fernández Herrero and Martin Hammerschmidt and Victor Soltwisch and Michael Krumrey},
  year = {2020},
  doi = {10.1117/1.jmm.19.1.014001},
  url = {https://arxiv.org/abs/1910.08532},
  note = {Source identifier: 1910.08532}
}