TY  - RPRT
TI  - Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
AU  - Mika Pflüger
AU  - R. Joseph Kline
AU  - Analía Fernández Herrero
AU  - Martin Hammerschmidt
AU  - Victor Soltwisch
AU  - Michael Krumrey
PY  - 2020
DO  - 10.1117/1.jmm.19.1.014001
UR  - https://arxiv.org/abs/1910.08532
ID  - 1910.08532
ER  -