@misc{indiciae70dee0ecbcbf,
  title = {Wafer-size VO2 film prepared by water-vapor oxidant},
  author = {H. Ren and B. Li and X. Zhou and S. Chen and Y. Li and C. Hu and J. Tian and G. Zhang and Y. Pan and C. Zou},
  year = {2020},
  doi = {10.1016/j.apsusc.2020.146642},
  url = {https://arxiv.org/abs/1910.08776},
  note = {Source identifier: 1910.08776}
}