@misc{indiciae812fd0cb577b,
  title = {Structural and Nanochemical Properties of AlOx Layers in \$Al/AlO\_x/Al\$-Layer Systems for Josephson Junctions},
  author = {S. Fritz and L. Radtke and R. Schneider and M. Luysberg and M. Weides and D. Gerthsen},
  year = {2019},
  doi = {10.1103/physrevmaterials.3.114805},
  url = {https://arxiv.org/abs/1910.12963},
  note = {Source identifier: 1910.12963}
}