TY - RPRT TI - Structural and Nanochemical Properties of AlOx Layers in $Al/AlO_x/Al$-Layer Systems for Josephson Junctions AU - S. Fritz AU - L. Radtke AU - R. Schneider AU - M. Luysberg AU - M. Weides AU - D. Gerthsen PY - 2019 DO - 10.1103/physrevmaterials.3.114805 UR - https://arxiv.org/abs/1910.12963 ID - 1910.12963 ER -