@misc{indiciae67d4cd048429, title = {An efficient approach to global sensitivity analysis and parameter estimation for line gratings}, author = {Nando Farchmin and Martin Hammerschmidt and Philipp-Immanuel Schneider and Matthias Wurm and Bernd Bodermann and Markus Bär and Sebastian Heidenreich}, year = {2019}, doi = {10.1117/12.2525978}, url = {https://arxiv.org/abs/1910.14435}, note = {Source identifier: 1910.14435} }