@misc{indiciae885b216c6ad0, title = {Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas}, author = {Máté Vass and Sebastian Wilczek and Trevor Lafleur and Ralf Peter Brinkmann and Zoltán Donkó and Julian Schulze}, year = {2019}, doi = {10.1088/1361-6595/ab5f27}, url = {https://arxiv.org/abs/1911.02435}, note = {Source identifier: 1911.02435} }