TY  - RPRT
TI  - Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
AU  - Máté Vass
AU  - Sebastian Wilczek
AU  - Trevor Lafleur
AU  - Ralf Peter Brinkmann
AU  - Zoltán Donkó
AU  - Julian Schulze
PY  - 2019
DO  - 10.1088/1361-6595/ab5f27
UR  - https://arxiv.org/abs/1911.02435
ID  - 1911.02435
ER  -