@misc{indiciaeeb24f741b16f,
  title = {Multiphoton-excited DUV photolithography for 3D nanofabrication},
  author = {Atsushi Taguchi and Atsushi Nakayama and Ryosuke Oketani and Satoshi Kawata and Katsumasa Fujita},
  year = {2019},
  url = {https://arxiv.org/abs/1911.03526},
  note = {Source identifier: 1911.03526}
}