@misc{indiciae5381bd3b3c21,
  title = {Tailored Molybdenum Carbide Properties and Graphitic Nano Layer Formation by Plasma and Ion Energy Control during Plasma Enhanced ALD},
  author = {Eldad Grady and Marcel Verheijen and Tahsin Faraz and Saurabh Karwal and W. M. M. Kessels and Ageeth A. Bol},
  year = {2019},
  url = {https://arxiv.org/abs/1911.05046},
  note = {Source identifier: 1911.05046}
}