TY  - RPRT
TI  - Tailored Molybdenum Carbide Properties and Graphitic Nano Layer Formation by Plasma and Ion Energy Control during Plasma Enhanced ALD
AU  - Eldad Grady
AU  - Marcel Verheijen
AU  - Tahsin Faraz
AU  - Saurabh Karwal
AU  - W. M. M. Kessels
AU  - Ageeth A. Bol
PY  - 2019
UR  - https://arxiv.org/abs/1911.05046
ID  - 1911.05046
ER  -