@misc{indiciaebab31aa5089d,
  title = {Free-standing silicon shadow masks for transmon qubit fabrication},
  author = {I. Tsioutsios and K. Serniak and S. Diamond and V. V. Sivak and Z. Wang and S. Shankar and L. Frunzio and R. J. Schoelkopf and M. H. Devoret},
  year = {2020},
  doi = {10.1063/1.5138953},
  url = {https://arxiv.org/abs/1911.05924},
  note = {Source identifier: 1911.05924}
}