@misc{indiciae536f7c698865, title = {On the Homogeneity of TiN Kinetic Inductance Detectors Produced through Atomic Layer Deposition}, author = {Israel Hernandez and Martin Makler and Juan Estrada and Clecio R. Bom and Donna Kubik and Julian Amette and Jorge Montes and Andrew Leptop}, year = {2019}, url = {https://arxiv.org/abs/1911.06419}, note = {Source identifier: 1911.06419} }