@misc{indiciae640cdbb485a6,
  title = {A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500°C in Air},
  author = {Savannah R. Benbrook and Caitlin A. Chapin and Ruochen Lu and Yansong Yang and Songbin Gong and Debbie G. Senesky},
  year = {2019},
  doi = {10.3390/s21010149},
  url = {https://arxiv.org/abs/1911.10276},
  note = {Source identifier: 1911.10276}
}