TY  - RPRT
TI  - A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500°C in Air
AU  - Savannah R. Benbrook
AU  - Caitlin A. Chapin
AU  - Ruochen Lu
AU  - Yansong Yang
AU  - Songbin Gong
AU  - Debbie G. Senesky
PY  - 2019
DO  - 10.3390/s21010149
UR  - https://arxiv.org/abs/1911.10276
ID  - 1911.10276
ER  -