@misc{indiciae6e2b0f642d10,
  title = {A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks},
  author = {Tobias Schlosser and Frederik Beuth and Michael Friedrich and Danny Kowerko},
  year = {2024},
  doi = {10.1109/etfa.2019.8869311},
  url = {https://arxiv.org/abs/1911.11250},
  note = {Source identifier: 1911.11250}
}